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Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers - ScienceDirect
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In‐Volume Laser Direct Writing of Silicon—Challenges and Opportunities - Chambonneau - 2021 - Laser & Photonics Reviews - Wiley Online Library
Temperature dependent ablation threshold in silicon using ultrashort laser pulses: Journal of Applied Physics: Vol 112, No 10
